发明名称 DRY HIGH POTENTIAL TESTER AND SOLAR SIMULATOR TOOL
摘要 A method and apparatus for testing a photovoltaic substrate disposes the substrate on a support gantry with connection points such as vacuum cups. The gantry is actuated into a test position. A probe nest coupled to the gantry connects to a junction box on the substrate. A power supply applies voltage to the junction box, and an actuated frame contacts an edge region of the substrate to detect any breakthrough current. The actuated frame comprises a liner for maximizing contact with the edge of the substrate. The liner may be conductive, or may have a conductive surface. Current sensors coupled to the conductive liner of the frame detect any breakthrough current. A solar spectrum simulator provides solar spectrum radiation for testing the photovoltaic properties of the substrate.
申请公布号 US2011003404(A1) 申请公布日期 2011.01.06
申请号 US20090561160 申请日期 2009.09.16
申请人 APPLIED MATERIALS, INC. 发明人 WANG PETER;WHITESELL, III HARRY SMITH;LU DANNY CAM TOAN;SU TZAY-FA;MARRIOT MICHAEL;MA XUE HONG;LI XIAONING;LING JIE
分类号 H01L21/66;G01R31/26;G06G7/48 主分类号 H01L21/66
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