发明名称 |
DRY HIGH POTENTIAL TESTER AND SOLAR SIMULATOR TOOL |
摘要 |
A method and apparatus for testing a photovoltaic substrate disposes the substrate on a support gantry with connection points such as vacuum cups. The gantry is actuated into a test position. A probe nest coupled to the gantry connects to a junction box on the substrate. A power supply applies voltage to the junction box, and an actuated frame contacts an edge region of the substrate to detect any breakthrough current. The actuated frame comprises a liner for maximizing contact with the edge of the substrate. The liner may be conductive, or may have a conductive surface. Current sensors coupled to the conductive liner of the frame detect any breakthrough current. A solar spectrum simulator provides solar spectrum radiation for testing the photovoltaic properties of the substrate.
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申请公布号 |
US2011003404(A1) |
申请公布日期 |
2011.01.06 |
申请号 |
US20090561160 |
申请日期 |
2009.09.16 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WANG PETER;WHITESELL, III HARRY SMITH;LU DANNY CAM TOAN;SU TZAY-FA;MARRIOT MICHAEL;MA XUE HONG;LI XIAONING;LING JIE |
分类号 |
H01L21/66;G01R31/26;G06G7/48 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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