发明名称 |
ACCELERATION SENSOR, DEVICE FOR GENERATING ELECTRICITY BY VIBRATION, AND ACCELERATION SENSOR MANUFACTURING METHOD |
摘要 |
<p>Provided an acceleration sensor and a device for generating electricity by vibration in which a piezoelectric layer formed on a substrate, a plurality of detection electrodes formed inside the piezoelectric layer, and the piezoelectric layer between the detection electrodes are polarized in the film thickness direction of the piezoelectric layer.</p> |
申请公布号 |
WO2011001515(A1) |
申请公布日期 |
2011.01.06 |
申请号 |
WO2009JP61983 |
申请日期 |
2009.06.30 |
申请人 |
FUJITSU LIMITED;AOKI, TSUYOSHI;KURIHARA, KAZUAKI;UMEMIYA, SHIGEYOSHI |
发明人 |
AOKI, TSUYOSHI;KURIHARA, KAZUAKI;UMEMIYA, SHIGEYOSHI |
分类号 |
G01P15/09 |
主分类号 |
G01P15/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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