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发明名称
BAKE APPARATUS AND METHOD OF BAKING USING THE SAME
摘要
申请公布号
KR101005885(B1)
申请公布日期
2011.01.06
申请号
KR20080104902
申请日期
2008.10.24
申请人
发明人
分类号
H01L21/324;H01L21/677
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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