| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card which can shorten the time required for mounting and deal a high temperature test.SOLUTION: The probe card includes an ST substrate 200 and a plurality of probe units 100a disposed in under surface of the ST substrate 200. In the under surface of the ST substrate 200, a plurality of connecting electrodes 211 are disposed. The probe unit 100a includes a probe substrate 110, a plurality of probes 120 formed as one body on the under surface of the probe substrate 110 and a plurality of bonding wires 130. In the under surface of the probe substrate 110, a plurality of electrodes 113 and a plurality of conductive lines 112 for connecting each of the electrodes 113 and probes 120 are formed. The bonding wires 130 connect each of the electrodes 113 and the connecting electrodes 211. |
