METHOD AND DEVICE FOR THE DEPOSITION OF THIN LAYERS, PARTICULARLY FOR PRODUCING MULTI-LAYER COATINGS, NANOLAYERS, NANOSTRUCTURES AND NANOCOMPOSITES

摘要

The present invention relates to a method for the deposition of thin layers, particularly for producing multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, which is characterized by the following features: a) the target (5) is divided into segments (17, 18) with materials having most differing physical and/or chemical properties; b) individual segments (17, 18) of said target (5) are irradiated with an in each case different radiation intensity by means of a controlled energetic distribution (29) of the focused laser energy via the laser beam cross section (28) so that each target segment (17, 18) absorbs the quantity of laser energy during the irradiation, which is required to evaporate or desorb the target material present in the respective segment (17, 18).