发明名称 |
ADAPTIVE DEFORMABLE MIRROR FOR COMPENSATING ERRORS OF A WAVE FRONT |
摘要 |
<p>An adaptive mirror that includes a substrate layer, on the first surface of which a reflecting layer and on the second surface of which at least one actuator is disposed. The substrate layer has a thickness of less than or equal to 1,000μm and the mirror having at least one further metallization for thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted such that the desired curvature is set as a function of the reflected power.</p> |
申请公布号 |
EP2269106(A1) |
申请公布日期 |
2011.01.05 |
申请号 |
EP20090721233 |
申请日期 |
2009.03.17 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;FRIEDRICH-SCHILLER-UNIVERSITAET JENA |
发明人 |
REINLEIN, CLAUDIA;BECKERT, ERIK;PESCHEL, THOMAS;DAMM, CHRISTOPH |
分类号 |
G02B26/06 |
主分类号 |
G02B26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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