A method of monitoring a surfactant in a microelectronic process by absorbance,申请号GB20100018800-传众专利搜索

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发明名称	A method of monitoring a surfactant in a microelectronic process by absorbance
摘要
申请公布号	GB2471627(A)	申请公布日期	2011.01.05
申请号	GB20100018800	申请日期	2008.04.08
申请人	NALCO COMPANY	发明人	AMY M TSENG;JOHN E HOOTS;BRIAN V JENKINS
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
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