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发明名称
ATMOSPHERIC PRESSURE CHEMICAL VAPOUR DEPOSITION METHOD FOR PRODUCING A N-SEMICONDUCTIVE METAL SULPHIDE THIN LAYER
摘要
申请公布号
EP2268847(A1)
申请公布日期
2011.01.05
申请号
EP20090727706
申请日期
2009.03.14
申请人
HELMHOLTZ-ZENTRUM BERLIN FUER MATERIALIEN UND ENERGIE GMBH
发明人
ALLSOP, NICHOLAS;FISCHER, CHRISTIAN-HERBERT;GLEDHILL, SOPHIE;LUX-STEINER, MARTHA CHRISTINA
分类号
C23C16/08;C23C16/18;C23C16/30;C23C16/448;C23C16/455;C23C16/52
主分类号
C23C16/08
代理机构
代理人
主权项
地址
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