| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a spin processor which can hold a substrate by reliably bringing a plurality of holding parts into contact with the peripheral surface of the substrate. SOLUTION: The spin processor has a motor 14 which rotationally drives a rotary table 1, at least three supports 31 rotatably provided on the peripheral part of a rotary table along a peripheral direction at prescribed intervals, a holding part 44 which is provided at the upper end of each support eccentrically from a center of rotation and holds the substrate in contact with the peripheral surface of the substrate by eccentrically rotating by the rotation of the support, an opening/closing cylindrical body 53 which rotates the support selectively in a lock direction where each holding part approaches the outer peripheral surface of the substrate, and in a release direction where the holding part breaks away from the outer peripheral surface of the substrate, and a torsional spring 62 which energizes each support in the lock direction separately, and brings each holding part into elastic contact with the outer peripheral surface of the substrate when the support is rotated in the lock direction by the opening/closing cylindrical body.</p> |
