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发明名称
METHOD FOR MANUFACTURING A LAYER OF GALLIUM NITRIDE OR GALLIUM ALUMINIUM NITRIDE
摘要
申请公布号
EP2269212(A1)
申请公布日期
2011.01.05
申请号
EP20090725028
申请日期
2009.03.11
申请人
PICOGIGA INTERNATIONAL
发明人
LAHRECHE, HACENE
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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