发明名称 Method for the production of electrically conductive transparent layers on flexible substrate, comprises thermally evaporating two metals such as aluminum, zinc, tin, indium, gallium and/or antimony from locally separated containers
摘要 <p>The method for the production of electrically conductive transparent layers on flexible substrate (1a), comprises thermally evaporating two metals such as aluminum, zinc, tin, indium, gallium and/or antimony from locally separated containers in such a way that exhaust steam-cudgel (5) of the evaporated metals mixes itself and a reactive gas is supplied to the exhaust steam-cudgel so that a mixed oxide forms itself as reaction product. The mixed oxide condenses on the substrate.</p>
申请公布号 DE102009031483(A1) 申请公布日期 2011.01.05
申请号 DE20091031483 申请日期 2009.07.02
申请人 RENT-A-SCIENTIST GMBH 发明人 NUERNBERGER, MICHAEL;NUSKO, ROBERT;MAIER, GEORG
分类号 C23C16/40 主分类号 C23C16/40
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