发明名称 |
Method for the production of electrically conductive transparent layers on flexible substrate, comprises thermally evaporating two metals such as aluminum, zinc, tin, indium, gallium and/or antimony from locally separated containers |
摘要 |
<p>The method for the production of electrically conductive transparent layers on flexible substrate (1a), comprises thermally evaporating two metals such as aluminum, zinc, tin, indium, gallium and/or antimony from locally separated containers in such a way that exhaust steam-cudgel (5) of the evaporated metals mixes itself and a reactive gas is supplied to the exhaust steam-cudgel so that a mixed oxide forms itself as reaction product. The mixed oxide condenses on the substrate.</p> |
申请公布号 |
DE102009031483(A1) |
申请公布日期 |
2011.01.05 |
申请号 |
DE20091031483 |
申请日期 |
2009.07.02 |
申请人 |
RENT-A-SCIENTIST GMBH |
发明人 |
NUERNBERGER, MICHAEL;NUSKO, ROBERT;MAIER, GEORG |
分类号 |
C23C16/40 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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