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发明名称
摘要
申请公布号
JP4606522(B2)
申请公布日期
2011.01.05
申请号
JP19990506142
申请日期
1998.07.14
申请人
发明人
分类号
H01L21/3065;H01L21/66;C23F4/00;H01L21/00;H01L21/302
主分类号
H01L21/3065
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