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经营范围
发明名称
Method of processing objects comprising a surface portion made of an insulator
摘要
申请公布号
EP1662559(B1)
申请公布日期
2011.01.05
申请号
EP20050026071
申请日期
2005.11.30
申请人
SANYO ELECTRIC CO., LTD.;KANTO SANYO SEMICONDUCTORS CO., LTD.
发明人
KAMEYAMA, KOJIRO;SUZUKI, AKIRA;OKAYAMA, YOSHIO;UMEMOTO, MITSUO
分类号
H01L21/683
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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