发明名称 |
Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus |
摘要 |
<p>In a piezoelectric element 20 , a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1 , and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.</p> |
申请公布号 |
EP2019322(B1) |
申请公布日期 |
2011.01.05 |
申请号 |
EP20080018580 |
申请日期 |
2003.06.20 |
申请人 |
PANASONIC CORPORATION |
发明人 |
TORII, HIDEO;FUJII, EIJI;TOMOZAWA, ATSUSHI;MURATA, AKIKO;TAKAYAMA, RYOICHI;HIRASAWA, TAKU |
分类号 |
B41J2/14;G01C19/56;G01C19/5607;G01P15/09;H01L41/047;H01L41/09;H01L41/316;H01L41/319 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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