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发明名称
VERFAHREN ZUR HERSTELLUNG VON SILICIUM
摘要
申请公布号
DE60238399(D1)
申请公布日期
2011.01.05
申请号
DE20026038399
申请日期
2002.06.06
申请人
TOKUYAMA CORP.
发明人
WAKAMATSU, SATORU;ODA, HIROYUKI
分类号
C01B33/035
主分类号
C01B33/035
代理机构
代理人
主权项
地址
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