,申请号JP20010181639-传众专利搜索

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发明名称
摘要
申请公布号	JP4605940(B2)	申请公布日期	2011.01.05
申请号	JP20010181639	申请日期	2001.06.15
申请人		发明人
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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