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发明名称
Linearmotor für einen Belichtungsapparat und ein diesen Apparat nutzendes Geräteherstellungsverfahren
摘要
申请公布号
DE69842013(D1)
申请公布日期
2011.01.05
申请号
DE19986042013
申请日期
1998.09.23
申请人
CANON K.K.
发明人
KORENAGA, NOBUSHIGE
分类号
G12B5/00;H02K41/03;B23Q5/28;G03F7/20;H01L21/027
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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