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发明名称
Aluminium nitride materials and members for use in the production of semiconductors
摘要
申请公布号
EP1452510(B1)
申请公布日期
2011.01.05
申请号
EP20040251025
申请日期
2004.02.25
申请人
NGK INSULATORS, LTD.
发明人
KOBAYASHI, YOSHIMASA;HAYASE, TORU;TERATANI, NAOMI;YOSHIKAWA, JUN;YAMADA, NAOHITO
分类号
C04B35/581;C04B35/645;H01L21/68
主分类号
C04B35/581
代理机构
代理人
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