ALIGNMENT MODULE FOR SUBSTRATE AND LITHOGRAPH APPARATUS HAVING THE ALIGNMENT MODULE

摘要

PURPOSE: A substrate alignment module and a lithograph apparatus having same are provided to improve the position aligning accuracy of a substrate by precisely measuring the position of the substrate during the alignment process of the substrate. CONSTITUTION: A substrate holder(11) supports a substrate(1). A stamp holder(12) is installed with a stamp(3). The stamp holder comprises a first holder(121), a second holder(122), and a guide(123) supporting the linear movement of the second holder. The substrate securing unit(13) clinches the stamp holder, the aligned substrate, and the stamp.