GAS-BARRIER FILM, PROCESS FOR PRODUCING GAS-BARRIER FILM, RESIN BASE WITH THE GAS-BARRIER FILM FOR ORGANIC ELECTROLUMINESCENT ELEMENT, AND ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

A gas barrier film comprising a resin substrate provided thereon at least one layer of a ceramic film, wherein the density ratio Y (= Áf / Áb) satisfies 1 ‰¥ Y ‰¥ 0.95 and the ceramic film has a residual stress being a compression stress of 0.01 MPa or more and 100 Mpa or less, wherein Áf is the density of the ceramic film and Áb is the density of a comparative ceramic film being formed by thermal oxidation or thermal nitridation of a metal as a mother material of the ceramic film so as to being the same composition ratio of the ceramic film.