发明名称 IMPRINT APPARATUS
摘要 <p>PURPOSE: An imprint apparatus is provided to improve the hardening performance by heating the flexible substrate or irradiating the ultraviolet ray on the flexible substrate while supporting the pressure of a pressing unit. CONSTITUTION: A substrate unit(110) supplies and retrieves a flexible substrate(B). The substrate unit comprises a substrate supply roll(111), a substrate recovery roll(112), and a substrate guide roller(113). A transcription unit(120) is positioned on the moving path of the flexible substrate and transcribes the certain pattern on the flexible substrate.</p>
申请公布号 KR101005584(B1) 申请公布日期 2011.01.05
申请号 KR20090127883 申请日期 2009.12.21
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 LIM, HYUNG JUN;LEE, JAE JONG;CHOI, KEE BONG;KIM, GEE HONG
分类号 H01L21/027;B82B3/00 主分类号 H01L21/027
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