,申请号JP20040508377-传众专利搜索

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发明名称
摘要
申请公布号	JP4606162(B2)	申请公布日期	2011.01.05
申请号	JP20040508377	申请日期	2003.05.16
申请人		发明人
分类号	C23C14/35;H01J37/34	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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