发明名称 Component mounting method, component mounting apparatus, and ultrasonic bonding head
摘要 A component mounting apparatus includes a component feeder that feeds a component with its bump electrodes facing down, a mounting head that mounts the component onto a substrate, a supporting base that secures the substrate, and a positioning device that aligns the component with the substrate. The mounting head includes an ultrasonic vibration generator, an ultrasonic vibration propagation member that conveys the ultrasonic vibration provided by the ultrasonic vibration generator to a working face holding the component as vibration parallel thereto, a pressure loader that applies a pressure load to the working face from a position immediately thereabove in the direction perpendicular thereto, and a heater that heats the vicinity of the working face. Thereby, ultrasonic bonding is carried out with high reliability even if the component has a number of bump electrodes on its face.
申请公布号 US7861908(B2) 申请公布日期 2011.01.04
申请号 US20070731312 申请日期 2007.03.30
申请人 PANASONIC CORPORATION 发明人 MINAMITANI SHOZO;MAE TAKAHARU;UENO YASUHARU;YAMADA AKIRA;KANAYAMA SHINJI;AKITA MAKOTO;WATANABE NOBUHISA;MORI AKIRA;NAITO HIROYUKI;MARUMO SHINYA;MORIKAWA MAKOTO
分类号 B23K1/06;B23K20/10;H01L21/00 主分类号 B23K1/06
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