发明名称 Semiconductor device having metal lines with slits
摘要 A semiconductor device including a semiconductor substrate, an integrated circuit on the semiconductor substrate, an insulation layer covering the integrated circuit, and a plurality of metal line patterns on the insulation layer. First and second adjacent metal line patterns of the plurality of metal line patterns are spaced apart from each other by a space, and each of the first and second adjacent metal line patterns has at least one slit.
申请公布号 US7863746(B2) 申请公布日期 2011.01.04
申请号 US20070882805 申请日期 2007.08.06
申请人 MOSAID TECHNOLOGIES INCORPORATED 发明人 YI SANG-HYUN;KIM YOUNG-NAM
分类号 H01L29/40 主分类号 H01L29/40
代理机构 代理人
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