发明名称 Silicon carbide on diamond substrates and related devices and methods
摘要 A high power, wide-bandgap device is disclosed that exhibits reduced junction temperature and higher power density during operation and improved reliability at a rated power density. The device includes a diamond substrate for providing a heat sink with a thermal conductivity greater than silicon carbide, a single crystal silicon carbide layer on the diamond substrate for providing a supporting crystal lattice match for wide-bandgap material structures that is better than the crystal lattice match of diamond, and a Group III nitride heterostructure on the single crystal silicon carbide layer for providing device characteristics.
申请公布号 US7863624(B2) 申请公布日期 2011.01.04
申请号 US20090504725 申请日期 2009.07.17
申请人 CREE, INC. 发明人 SAXLER ADAM WILLIAM
分类号 H01L29/778;H01L21/20;H01L23/373 主分类号 H01L29/778
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