| 发明名称 |
Methods of reducing CD loss in a microelectromechanical device |
| 摘要 |
Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.
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| 申请公布号 |
US7863079(B2) |
申请公布日期 |
2011.01.04 |
| 申请号 |
US20080026131 |
申请日期 |
2008.02.05 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
KOTHARI MANISH;CHUI CLARENCE;GUDLAVALLETI SAURI |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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