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发明名称
METHOD FOR FORMING MICROPATTERN IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101004691(B1)
申请公布日期
2011.01.04
申请号
KR20070092642
申请日期
2007.09.12
申请人
发明人
分类号
H01L21/32
主分类号
H01L21/32
代理机构
代理人
主权项
地址
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