| 发明名称 |
Thinner composition and method of removing photoresist using the same |
| 摘要 |
A thinner composition includes propylene glycol ether acetate, methyl 2-hydroxy-2-methyl propionate, and an ester compound such as ethyl lactate, ethyl 3-ethoxy propionate or a mixture thereof.
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| 申请公布号 |
US7863231(B2) |
申请公布日期 |
2011.01.04 |
| 申请号 |
US20080118778 |
申请日期 |
2008.05.12 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
AHN SEUNG-HYUN;BAE EUN-MI;CHOI BAIK-SOON;CHON SANG-MUN;KIM DAE-JOUNG;YOON KWANG-SUB;PARK SANG-KYU;KIM JAE-HO;YI SHI-YONG;KIM KYOUNG-MI;YOUN YEU-YOUNG |
| 分类号 |
C11D7/50;G03F7/42;C09D9/00;C09D9/04;C11D1/00;C11D7/26;C11D11/00;G03F7/38;H01L21/027;H01L21/304 |
主分类号 |
C11D7/50 |
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