发明名称 |
Composite coating device and method of forming overcoat on magnetic head using the same |
摘要 |
A composite coating device includes first to third processing chambers. The first processing chamber performs an ion beam etching as a pretreatment process in which an ion beam is irradiated on a surface of a magnetic head at a predetermined angle and the surface is removed for a predetermined depth. The second processing chamber performs a magnetron sputter deposition as a shock absorbing coating formation process in which a shock absorbing coating is formed on the pretreated surface. The third processing chamber performs an electron cyclotron resonance plasma chemical vapor epitaxy or a cathode arc discharge deposition as an overcoat formation process in which an overcoat is formed on the shock absorbing coating. A preparation chamber communicates with the first to third processing chambers through opening and closing devices for transferring the magnetic head.
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申请公布号 |
US7862694(B2) |
申请公布日期 |
2011.01.04 |
申请号 |
US20040854238 |
申请日期 |
2004.05.27 |
申请人 |
SHIMADZU CORPORATION |
发明人 |
KONISHI YOSHIYUKI;UEDA MASAHIRO;SUZUKI MASAYASU |
分类号 |
C25B9/00;C23C14/00;C23C14/02;C23C14/32;C23C14/56;C23C16/00;C23C16/511;C23C16/54;C25B11/00;C25B13/00;G11B5/10;G11B5/127;G11B5/187;G11B5/255;G11B5/31;G11B5/40;G11B5/60 |
主分类号 |
C25B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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