发明名称 |
Micro gas sensor and manufacturing method thereof |
摘要 |
A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
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申请公布号 |
US7861575(B2) |
申请公布日期 |
2011.01.04 |
申请号 |
US20080142695 |
申请日期 |
2008.06.19 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
JUN CHI HOON;KO SANG CHOON;JUNG MOON YOUN;PARK SEON HEE |
分类号 |
G01N7/00;G01N27/12 |
主分类号 |
G01N7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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