FACING TARGET TYPE SPUTTERING APPARATUS,申请号KR20060126115-传众专利搜索

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发明名称	FACING TARGET TYPE SPUTTERING APPARATUS
摘要
申请公布号	KR101005204(B1)	申请公布日期	2011.01.03
申请号	KR20060126115	申请日期	2006.12.12
申请人		发明人
分类号	C23C14/35;C23C14/34	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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