| 摘要 |
PURPOSE: A device for detecting an air leak for a vacuum sealing structure of a motor is provided to reduce manufacturing costs and to improve production efficiency by minimizing damage to a wafer. CONSTITUTION: A device for detecting an air leak for a vacuum sealing structure of a motor comprises a vacuum pressure detecting unit(100). A pressure detection groove(52) is installed in the vacuum pressure detecting unit by passing through a part of the inner wall of a housing. The vacuum pressure detecting unit measures and detects a vacuum pressure leak by using a pressure detection connector. The vacuum pressure detecting unit comprises a vacuum pressure detector(50), a vacuum control valve(60), a vacuum pump(80), a vacuum pump connector(70), and a main controller(90).
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