APPARATUS FOR TRANSFERRING A SUBSTRATE

摘要

PURPOSE: An apparatus for transferring a substrate is provided to prevent the damage of substrates by forming a substrate protective layer on the surface of an air-spraying module with a plurality of air-spraying holes. CONSTITUTION: A plurality of air-spraying holes(H) is formed on the upper wall of an air-spraying module(210). The upper wall forms the surface of the air-spraying module. A substrate protective layer(250) is arranged on the surface of the air-spraying module and protects substrates. An expanding hole(251) is formed at the substrate protective layer in order to increase the cross sections of the air-spraying holes.