| 摘要 |
PURPOSE: A particle generation factor determining system, a charging method, and a storage medium are provided to teach a user on cost benefit effect of using particle generation factor determining system. CONSTITUTION: A server device(13) exchanges the data with a user interface device(11) or a database machine(12). The user interface device comprises the personal computer. The user interface device is inputted with the photograph data of a wafer by a user or the SEM image data of the particle.
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