发明名称 |
APPARATUS AND METHOD OF FABRICTING THIN FILM TRANSISTOR ARRAY SUBSTRATE |
摘要 |
The present invention relates to an apparatus and a method of fabricating a thin film transistor array substrate. The apparatus includes a dip strip part for stripping a photo-resist pattern and a thin film formed on a substrate by using a stripper; a removing part for removing residual photo-resist and thin film from the substrate; and a jet strip part for jetting the stripper to remove residual particles of photo-resist and thin film left on the substrate. The method of fabricating includes dipping a substrate in a stripper, wherein the substrate has a photo-resist pattern and a thin film, the thin film being formed on an entire surface of the substrate so as to cover the photo-resist pattern; removing residual photo-resist and thin film using the stripper; and removing particles of residual photo-resist and thin film left on the substrate.
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申请公布号 |
US2010326469(A1) |
申请公布日期 |
2010.12.30 |
申请号 |
US20100880761 |
申请日期 |
2010.09.13 |
申请人 |
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发明人 |
KWON OH NAM;CHO HEUNG LYUL |
分类号 |
B08B1/00;G02F1/13;B08B3/00;G03C5/00;G03F7/42;H01L21/77 |
主分类号 |
B08B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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