发明名称 |
Piezoelectric resonator structures having temperature compensation |
摘要 |
An electrical resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate glass (BSG).
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申请公布号 |
US2010327701(A1) |
申请公布日期 |
2010.12.30 |
申请号 |
US20090494886 |
申请日期 |
2009.06.30 |
申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. |
发明人 |
GRANNEN KEVIN J.;ROGERS CARRIE A.;CHOY JOHN |
分类号 |
H01L41/04;H01L41/22 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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