| 发明名称 |
METHODS OF FORMING ELECTRONIC DEVICES |
| 摘要 |
Methods of forming electronic devices are provided. The methods involve alkaline treatment of photoresist patterns and allow for the formation of high density resist patterns. The methods find particular applicability in semiconductor device manufacture.
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| 申请公布号 |
US2010330501(A1) |
申请公布日期 |
2010.12.30 |
| 申请号 |
US20100825170 |
申请日期 |
2010.06.28 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
BAE YOUNG CHEOL;CARDOLACCIA THOMAS;LIU YI |
| 分类号 |
G03F7/004;G03F7/20 |
主分类号 |
G03F7/004 |
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