SELF-ALIGNED NANO-SCALE DEVICE WITH PARALLEL PLATE ELECTRODES

摘要

PURPOSE: A self-aligned nano scale device with parallel plate electrodes is provided to obtain a small separation distance between tapered vertical units of conductive plates. CONSTITUTION: A substrate includes an insulation layer. A top surface(11) is the upper horizontal surface of the insulation layer on the substrate. A conductive layer(20) is embedded to the upper side of the sidewalls of an adjacent dip trench. The conductive layer is formed by adopting a non-conformal deposition process.