发明名称 A COATING FILM MANUFACTURING APPARATUS AND MANUFACTURING METHOD COATING FILM OF USE IT
摘要 PURPOSE: A coating film manufacturing apparatus and a manufacturing method coating film of use the same are provided to minimize the crack of a coating film by uniformly removing volatile solvents included in the coating film. CONSTITUTION: A conveying unit(110) transfers a flexible board(102). A purification unit(120) eliminates the contaminant on the surface of the flexible board. The coating unit(130) forms a coating film on the surface of the flexible board through a slot-die-coating method. A heating unit(140) heats the flexible board in which the coating film is formed.
申请公布号 KR20100137134(A) 申请公布日期 2010.12.30
申请号 KR20090055407 申请日期 2009.06.22
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 CHUNG, KOOK CHAE;KIM, YOUNG KUK;CHOI, CHUL JIN
分类号 H01L33/44 主分类号 H01L33/44
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