发明名称 |
METHODS AND APPARATUS FOR PREDICTIVE PREVENTIVE MAINTENANCE OF PROCESSING CHAMBERS |
摘要 |
A method for assessing health status of a processing chamber is provided. The method includes executing a recipe. The method also includes receiving processing data from a set of sensors during execution of the recipe. The method further includes analyzing the processing data utilizing a set of multi-variate predictive models. The method yet also includes generating a set of component wear data values. The method yet further includes comparing the set of component wear data values against a set of useful life threshold ranges. The method moreover includes generating a warning if the set of component wear data values is outside of the set of useful life threshold ranges.
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申请公布号 |
US2010332201(A1) |
申请公布日期 |
2010.12.30 |
申请号 |
US20100826575 |
申请日期 |
2010.06.29 |
申请人 |
ALBAREDE LUC;PAPE ERIC;VENUGOPAL VIJAYAKUMAR C;CHOI BRIAN D |
发明人 |
ALBAREDE LUC;PAPE ERIC;VENUGOPAL VIJAYAKUMAR C.;CHOI BRIAN D. |
分类号 |
G06F17/10;G06G7/62 |
主分类号 |
G06F17/10 |
代理机构 |
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主权项 |
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地址 |
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