发明名称 FLUID MIXING SYSTEM AND FLUID MIXING APPARATUS
摘要 <p>A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.</p>
申请公布号 KR101005031(B1) 申请公布日期 2010.12.30
申请号 KR20080084568 申请日期 2008.08.28
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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