THE OXIDATION DEVICE OF CERAMIC CRUCIBLE FURNACE FOR CRYSTAL GROWTH

摘要

PURPOSE: A ceramic crucible oxidation apparatus for growing crystal is provided to prevent an oxide film forming process from contamination by maintaining a vacuum condition in the apparatus. CONSTITUTION: A pBN crucible(11) is contained in a heating space(12), and a heating process is performed. A cooling space(13) is arranged at the lower side of the heating space and cools the high temperature of the heating space. A ceramic heat insulating block(15) is prepared. The upper side of the pBN crucible is inserted to the lower side of the ceramic heat insulating block.