发明名称 |
Pellicle frame and lithographic pellicle |
摘要 |
A pellicle frame is provided that comprises a pellicle frame bar having a quadrilateral cross-section, wherein an upper edge and a lower edge of a basic quadrilateral forming said cross-section are parallel to each other and each of side edges of the basic quadrilateral has one quadrilateral recess. There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face. |
申请公布号 |
EP2267526(A2) |
申请公布日期 |
2010.12.29 |
申请号 |
EP20100166659 |
申请日期 |
2010.06.21 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD.;INTEL CORPORATION (INTEL) |
发明人 |
SHIRASAKI, TORU;MUSHELL, DAVID;CHAKRAVORTY, KISHORE;NG, GRACE |
分类号 |
G03F1/64;B65D85/86;H01L21/027 |
主分类号 |
G03F1/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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