OPTICAL FILTER AND SPECTROSCOPY METHOD THEREOF

摘要

An optical filter and a spectroscopy method thereof are provided. The optical filter (100) includes a beam incidence part (110), a programmable MEMS (Micro Electro-Mechanical System) grating (120), a beam receiving part (130), and a control drive module. The relative positions among the beam incidence part (110), the programmable MEMS grating (120) and the beam receiving part (130) are fixed. A multi-wavelength beam is impinged upon the programmable MEMS grating (120) from the beam incidence part (110). The beam receiving part (130) is located in the emission direction of the multi-wavelength beam in order to receive a beam having a specific wavelength. The emission angle of the beam is continuously changed according to the different wavelength by using the spectroscopy method of the optical filter.