METHOD FOR PRODUCING METAL OXIDE LAYERS HAVING A PRE-DEFINED STRUCTURE BY WAY OF ARC EVAPORATION

摘要

In a cathode spark physical vapour deposition process, the vapour deposit is directed at a metal powder target consisting of two metal or semi-metal components. The components are selected such that the solid phase boundary is not passed on reaching the liquid phase, as compared with the phase diagram of a molten mixture of the two components.