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发明名称
Method and device for suppressing arc discharges during a plasma process
摘要
申请公布号
EP1978542(B1)
申请公布日期
2010.12.29
申请号
EP20070004758
申请日期
2007.03.08
申请人
HUETTINGER ELEKTRONIK GMBH + CO. KG
发明人
WIEDEMUTH, PETER
分类号
H01J37/32;H01J37/34
主分类号
H01J37/32
代理机构
代理人
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