发明名称 METHOD FOR THE PRODUCTION OF CERAMIC STRUCTURES CONTAINING SILICON
摘要 <p>In a method for producing silicon-containing ceramic structures, structures of a ceramic precursor polymer are provided on the surface of a substrate, the ceramic precursor polymer being selected from the group including polysiloxanes, polycarbosilanes, polysilazanes and/or polyureasilazanes, and the ceramic precursor structures being ceramicized on the substrate. In the method, the structures of the ceramic precursor polymer have a height of≰20μm and a width perpendicular to their longitudinal axis of≰500μm.</p>
申请公布号 EP2265543(A2) 申请公布日期 2010.12.29
申请号 EP20090731058 申请日期 2009.03.31
申请人 ROBERT BOSCH GMBH 发明人 KOEHNE, MARTIN;BEKKER, VIACHESLAV;OBERLE, JUERGEN
分类号 B81C1/00 主分类号 B81C1/00
代理机构 代理人
主权项
地址