发明名称 SINGLE-CRYSTAL GROWTH APPARATUS AND RAW-MATERIAL SUPPLY METHOD
摘要 <p>A single-crystal growth apparatus includes: a raw-material accumulation tube housed in a pull chamber; a bottom lid attached to a lower end opening of the raw-material accumulation tube; a shaft connected to the bottom lid to lift/lower the accumulation tube and bottom lid; a forward/backward movable raw-material guide tube having a leading end to be inserted through a side wall of the pull chamber into the raw-material accumulation tube; and a raw-material supply apparatus for supplying solid raw materials through the raw-material guide tube into the raw-material accumulation tube, in which the solid raw materials are supplied from the raw-material supply apparatus, through the raw-material guide tube, to the raw-material accumulation tube with the leading end of the raw-material guide tube being inserted into the raw-material accumulation tube, so as to accumulate the solid raw materials, and the bottom lid is lowered to drop the solid raw materials into a crucible. Thus a large amount of raw-material melt can be formed efficiently in the crucible during growth of single crystal.</p>
申请公布号 EP2267188(A1) 申请公布日期 2010.12.29
申请号 EP20090735167 申请日期 2009.02.26
申请人 SUMCO CORPORATION 发明人 FUJIWARA, TOSHIYUKI;HOSOI, TAKEHIKO;YOTSUI, TAKUYA;FURUYA, HISASHI
分类号 C30B15/02;C30B29/06 主分类号 C30B15/02
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