Showerhead and Chemical Vapor Deposition Apparatus Having the Same,申请号KR20080038207-传众专利搜索

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发明名称	Showerhead and Chemical Vapor Deposition Apparatus Having the Same
摘要
申请公布号	KR101004927(B1)	申请公布日期	2010.12.29
申请号	KR20080038207	申请日期	2008.04.24
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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