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发明名称
SYSTEM AND METHOD FOR IMPROVEMENT OF ALIGNMENT AND OVERLAY FOR MICROLITHOGRAPHY
摘要
The present invention provides a method for determining the forces to be applied to a substrate in order to deform the same and correct for overlay misalignment.
申请公布号
EP1774407(A4)
申请公布日期
2010.12.29
申请号
EP20050756484
申请日期
2005.06.02
申请人
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
发明人
CHERALA, ANSHUMAN;SREENIVASAN, SIDLGATA V.;ADUSUMILLI, KRANTHIMITRA
分类号
G03F9/00;G03F7/00;G03F7/20
主分类号
G03F9/00
代理机构
代理人
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